Tsugawa, Tomohiro
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2

Metallic nanofilms on Si(100) and SiO2 grown with a rutheni..:

Bolotov, Leonid ; Kotsugi, Yohei ; Tsugawa, Tomohiro..
Japanese Journal of Applied Physics.  63 (2024)  8 - p. 085502 , 2024
 
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3

Nucleation and Layer Closure Behavior of Iridium Films Grow..:

Chung, Hong Keun ; Kim, Han ; Jeon, Jihoon...
The Journal of Physical Chemistry Letters.  14 (2023)  28 - p. 6486-6493 , 2023
 
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8

Nuclear Resonance Vibrational Spectroscopy and DFT study of..:

Park, Kiyoung ; Tsugawa, Tomohiro ; Furutachi, Hideki...
Angewandte Chemie International Edition.  52 (2012)  4 - p. 1294-1298 , 2012
 
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11

Area-Selective Atomic Layer Deposition of Ruthenium Using a..:

Hye-Mi Kim (9307187) ; Jung-Hoon Lee (770126) ; Seung-Hwan Lee (231008)...
https://figshare.com/articles/journal_contribution/Area-Selective_Atomic_Layer_Deposition_of_Ruthenium_Using_a_Novel_Ru_Precursor_and_H_sub_2_sub_O_as_a_Reactant/14770857.  , 2021
 
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Atomic Layer Deposition of Ru for Replacing Cu-Interconnect:

Yohei Kotsugi (11097565) ; Seung-Min Han (7474676) ; Youn-Hye Kim (11097568)...
https://figshare.com/articles/journal_contribution/Atomic_Layer_Deposition_of_Ru_for_Replacing_Cu-Interconnects/14932078.  , 1753
 
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