Uesugi, Kenjiro
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Polarity control of sputter-deposited AlN with high-tempera..:

Shojiki, Kanako ; Uesugi, Kenjiro ; Xiao, Shiyu.
Materials Science in Semiconductor Processing.  166 (2023)  - p. 107736 , 2023
 
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7

Corrigendum: "Fabrication of AlN templates by high-temperat..:

Uesugi, Kenjiro ; Miyake, Hideto
Japanese Journal of Applied Physics.  61 (2022)  7 - p. 079301 , 2022
 
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