E-LIB Suche - Ergebnisse für: Umisedo, Sei - Sprache EN

Search for persons X

Sorted by: Relevance

Sorted by: Year

1

Ion sources for ion implantation technology (invited):

Sakai, Shigeki ; Hamamoto, Nariaki ; Inouchi, Yutaka..
Review of Scientific Instruments. 85 (2014) 2 - p. , 2014

Link: https://doi.org/10.1063/..

2

Phosphorous transient enhanced diffusion suppression with c..:

, In: 2012 12th International Workshop on Junction Technology,

Nakashima, Yoshiki ; Hamamoto, Nariaki ; Nagayama, Tsutomu... - p. 109-112 , 2012

Link: https://doi.org/10.1109/..

3

Suppression of phosphorus diffusion using cluster Carbon co..:

, In: 2010 International Workshop on Junction Technology Extended Abstracts,

Nagayama, Tsutomu ; Onoda, Hiroshi ; Tanjyo, Masayasu... - p. 1-4 , 2010

Link: https://doi.org/10.1109/..

4

Effects of cluster carbon implantation at low temperature o..:

, In: 2010 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP),

Onoda, Hiroshi ; Hamamoto, Nariaki ; Nagayama, Tsutomu... - p. 72-75 , 2010

Link: https://doi.org/10.1109/..

5

Improvement of productivity by cluster ion implanter: CLARI:

, In: 2010 International Workshop on Junction Technology Extended Abstracts,

Tanjyo, Masayasu ; Hamamoto, Nariaki ; Umisedo, Sei... - p. 1-4 , 2010

Link: https://doi.org/10.1109/..

6

Cluster Ion Implantation System: Claris for Beyond 45nm Dev..:

Tanjyo, Masayasu ; Hamamoto, Nariaki ; Nagayama, Tsutomu...
ECS Transactions. 18 (2009) 1 - p. 1059-1064 , 2009

Link: https://doi.org/10.1149/..

7

Ion implantation technology and system for beyond 45nm node..:

, In: 2008 9th International Conference on Solid-State and Integrated-Circuit Technology,

Tanjyo, Masayasu ; Nagayama, Tsutomu ; Hamamoto, Nariaki... - p. None , 2008

Link: https://doi.org/10.1109/..

8

Development of Nissin new boron cluster ion implanter:

, In: 2007 International Workshop on Junction Technology,

Hamamoto, Nariaki ; Umisedo, Sei ; Koga, Yuji... - p. None , 2007

Link: https://doi.org/10.1109/..

9

Decaborane implantation with the medium current implanter:

Hamamoto, Nariaki ; Umisedo, Sei ; Nagayama, Tsutomu...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 237 (2005) 1-2 - p. 443-448 , 2005

Link: https://doi.org/10.1016/..

10

Monopole Dominance for Nonperturbative QCD:

Suganuma, Hideo ; Umisedo, Sei ; Sasaki, Shoich..
http://arxiv.org/abs/hep-ph/9602368. , 1996

Link: http://arxiv.org/abs/hep..

1-10