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Wolfram Langheinrich, Wolfram Langheinrich
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1
Fabrication of Lateral Tunnel Junctions and Measurement of ..:
Wolfram Langheinrich, Wolfram Langheinrich
;
Haroon Ahmed, Haroon Ahmed
Japanese Journal of Applied Physics. 34 (1995) 12S - p. 6956 , 1995
Link:
https://doi.org/10.1143/..
?
2
Fabrication of Metallic Structures in the 10 nm Region Usin..:
Wolfram Langheinrich, Wolfram Langheinrich
;
Heinz Beneking, Heinz Beneking
Japanese Journal of Applied Physics. 32 (1993) 12S - p. 6218 , 1993
Link:
https://doi.org/10.1143/..
?
3
The influence of the substrate on proximity effect and expo..:
Langheinrich, Wolfram
Microelectronic Engineering. 27 (1995) 1-4 - p. 199-202 , 1995
Link:
https://doi.org/10.1016/..
?
4
The resolution of the inorganic electron beam resist LiF(Al..:
Langheinrich, Wolfram
;
Beneking, Heinz
Microelectronic Engineering. 23 (1994) 1-4 - p. 287-290 , 1994
Link:
https://doi.org/10.1016/..
?
5
Nanostructure fabrication by electron beam lithography on i..:
Langheinrich, Wolfram
;
Beneking, Heinz
Microelectronic Engineering. 13 (1991) 1-4 - p. 225-228 , 1991
Link:
https://doi.org/10.1016/..
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