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2022 China Semiconductor Technology International Conference (CSTIC) ,
4
Improvement of CU-CMP EDP Curves for Different Pattern Dens..:
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2022 China Semiconductor Technology International Conference (CSTIC) ,
5
An Optimized Method for Cu CMP Dishing Improvement:
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2020 China Semiconductor Technology International Conference (CSTIC) ,
6
Pattern Loading Effect Optimization of BEOL Cu CMP in 14nm ..:
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Web Information Systems and Applications; Lecture Notes in Computer Science ,
8