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2024 Conference of Science and Technology for Integrated Circuits (CSTIC) ,
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Sidewall Kink Elimination of Slanted Gratings Utilizing a T..:
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2024 Conference of Science and Technology for Integrated Circuits (CSTIC) ,
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A Fully Automated VPD System for Noble Metal Control During..:
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2024 Conference of Science and Technology for Integrated Circuits (CSTIC) ,
7
Ion Beam Shaping as a Solution for Ultra-High Precision Pla..:
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2024 Conference of Science and Technology for Integrated Circuits (CSTIC) ,
8
A Novel Thin Film Deposition Method by IBD for Asymmetrical..:
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2023 China Semiconductor Technology International Conference (CSTIC) ,
13