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2023 China Semiconductor Technology International Conference (CSTIC) ,
3
Trimming of Silicon Nitride Hard Mask Using Cyclic Depositi..:
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2023 China Semiconductor Technology International Conference (CSTIC) ,
4
Strategy for line width roughness (LWR) reduction in carbon..:
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2023 China Semiconductor Technology International Conference (CSTIC) ,
5
Deep trench (DT) etching process for power MOS device:
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2023 China Semiconductor Technology International Conference (CSTIC) ,
6
A Technical Optimization of Waferless Auto Clean for Alumin..:
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2023 China Semiconductor Technology International Conference (CSTIC) ,
7
Redistribution Layer aluminum advanced etching process deve..:
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2022 China Semiconductor Technology International Conference (CSTIC) ,
9