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2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) ,
9
First Demonstration of BEOL-Compatible Atomic-Layer-Deposit..:
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2023 Silicon Nanoelectronics Workshop (SNW) ,
11
ALD Nanometer-Thin In2O3 for BEOL Logic, Memory and RF Appl..:
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2023 International VLSI Symposium on Technology, Systems and Applications (VLSI-TSA/VLSI-DAT) ,
12