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2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) ,
2
A Miniature Spot Position Detector Based on a Resonant Calo..:
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2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) ,
8
Enhanced Stiffness Sensitivity in a Mode Localized Sensor U..:
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2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) ,
13