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7
Low-stress LPCVD silicon nitride membranes and applications..
Mikrosystemtechnik
Copies: Zentrale;
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8
Development of a silicon MEMS transducer for microloudspeak..
Berichte aus der Halbleitertechnik
Copies: Zentrale;
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9
Resonant MEMS
fundamentals, implementation and application
Advanced micro & nanosystems ; 11th volume
Copies:
Zentrale:E02 a elt 716 m/254
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13
System-level modeling of MEMS
Advanced micro and nanosystems ; 10
Copies:
Zentrale:Magazinturm E02 a elt 716 m/354
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14
MEMS
fundamental technology and applications
Devices, circuits, and systems
Copies:
Zentrale:Magazinturm E02 a elt 716 m/079(3)
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15
MEMS for automotive and aerospace applicatons
Woodhead publishing series in electronic and optical materials ; Number 32
Copies:
Zentrale:Magazinturm E02 a elt 716 m/922