Ich stimme zu, dass diese Seite Cookies verwende. Weitere Informationen finden Sie unter unseren Datenschutzerklärungen .
X
Wei, Yayi
357  Ergebnisse:
Personensuche X
?
1

SCAPSM: attenuated phase-shift mask structure for EUV litho..:

Li, Chen ; Dong, Lisong ; Wei, Yayi
Applied Optics.  63 (2024)  9 - p. 2263 , 2024
Link: https://doi.org/10.1364/..
 
?
2

Dynamic budget analysis of multiple parameters in lithograp..:

wang, jiashuo ; Su, Xiaojing ; Dong, Lisong..
Optics Express.  , 2024
Link: https://doi.org/10.1364/..
 
?
3

A method for optical proximity correctionbased on a vector ..:

Wu, Ruixuan ; Dong, Lisong ; Wei, Yayi
Applied Optics.  , 2024
Link: https://doi.org/10.1364/..
 
?
4

Machine learning in electron beam lithography to boost phot..:

Zhao, Rongbo ; Wang, Xiaolin ; Xu, Hong..
Nanoscale.  16 (2024)  8 - p. 4212-4218 , 2024
Link: https://doi.org/10.1039/..
 
?
5

Machine Learning Applied to Electron Beam Lithography to Ac..:

Zhao, Rongbo ; Wang, Xiaolin ; Wei, Yayi..
ACS Applied Materials & Interfaces.  16 (2024)  17 - p. 22465-22470 , 2024
Link: https://doi.org/10.1021/..
 
?
6

Cluster Sampling and Scalable Bayesian Optimization with Co..:

Ma, Le ; Ma, Xing ; Hao, Shaogang...
Optics Express.  , 2024
Link: https://doi.org/10.1364/..
 
?
7

Influence of vibration of extreme ultraviolet lithographic ..:

Shen, Hao ; Zhang, Libin ; Wei, Yayi.
Optics Express.  , 2023
Link: https://doi.org/10.1364/..
 
?
8

Generation of inverse assist features using generative adve..:

Cao, Qingchen ; Xu, Peng ; Sun, Song..
Microelectronic Engineering.  273 (2023)  - p. 111951 , 2023
Link: https://doi.org/10.1016/..
 
?
9

Enhancement of pattern quality in maskless plasmonic lithog..:

Han, Dandan ; Deng, Sen ; Ye, Tianchun.
Microsystems & Nanoengineering.  9 (2023)  1 - p. , 2023
Link: https://doi.org/10.1038/..
 
?
10

Fast imaging model of periodic patterns in plasmonic lithog..:

, In: 2023 International Workshop on Advanced Patterning Solutions (IWAPS),
Ding, Huwen ; Wei, Yayi - p. 1-5 , 2023
Link: https://doi.org/10.1109/..
 
?
11

Process and Tool Monitor and Diagnosis Based on Overlay Dat..:

, In: 2023 China Semiconductor Technology International Conference (CSTIC),
Tong, Yi ; Zhang, Libin ; Wei, Yayi.. - p. 1-3 , 2023
Link: https://doi.org/10.1109/..
 
?
12

Enhancement of Pattern Depth in Plasmonic Lithography for P..:

, In: 2023 China Semiconductor Technology International Conference (CSTIC),
Han, Dandan ; Wei, Yayi - p. 1-3 , 2023
Link: https://doi.org/10.1109/..
 
?
13

Three-dimensional plasmonic lithography imaging modeling ba..:

Ding, Huwen ; Fan, Taian ; Zhang, Libin..
Optics Express.  31 (2023)  22 - p. 36061 , 2023
Link: https://doi.org/10.1364/..
 
?
14

Process optimization of contact hole patterns via a simulat..:

Zhao, Rongbo ; Wei, Yayi ; Xu, Hong.
Applied Optics.  62 (2023)  4 - p. 927 , 2023
Link: https://doi.org/10.1364/..
 
?
15

Spatial modulation of scalable nanostructures by combining ..:

Han, Dandan ; Ye, Tianchun ; Wei, Yayi
Nanoscale Advances.  5 (2023)  17 - p. 4424-4434 , 2023
Link: https://doi.org/10.1039/..
 
1-15