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Advanced metallization for ULSI applications
special issue Japanese journal of applied physics ; volume 57, number 7S2 (July 2018)
Nakatsuka, Osamu
;
Saito, Takeyasu
;
Suzuki, Keisuke
. , [2018]
Exemplar:
Zentrale:Magazinturm-E02
15z phy 084 jv/837-57
RT Book, Whole T1 <Title>Advanced metallization for ULSI applications</Title> : <SubTitle>special issue</SubTitle> UL https://suche.suub.uni-bremen.de/peid=B103244375&Exemplar=1&LAN=DE A1 Nakatsuka, Osamu A1 Saito, Takeyasu A1 Suzuki, Keisuke A1 Yokogawa, Shinji PB IOP Publishing PP [Tokyo] YR 2018 NO circa 97 Seiten in verschiedenen Seitenzählungen : Illustrationen T3 Japanese journal of applied physics ; volume 57, number 7S2 (July 2018) VO volume 57, number 7S2 (July 2018) LK http://katalog.suub.uni-bremen.de/DB=1/LNG=DU/CMD?ACT=SRCHA&IKT=8000&TRM=3617238998* CN Magazinturm-E02: 15z phy 084 jv/837-57 SF ELIB - SuUB Bremen
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