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Introduction to microlithography
ACS professional reference book
Thompson, Larry F.
- 2. ed. . , 1994
Exemplar:
Zentrale:Magazinturm E02
a elt 697 m/861(2)
RT Book, Whole T1 <Title>Introduction to microlithography</Title> UL https://suche.suub.uni-bremen.de/peid=B13160428&Exemplar=1&LAN=DE A1 Thompson, Larry F. NO 2. ed. PB American Chemical Soc. PP Washington, DC YR 1994 NO XIV, 527 S : Ill., graph. Darst T3 ACS professional reference book SN 0841228485 SN 9780841228481 K1 Kongress LK http://katalog.suub.uni-bremen.de/DB=1/LNG=DU/CMD?ACT=SRCHA&IKT=8000&TRM=21757849* CN Magazinturm E02: a elt 697 m/861(2) SF ELIB - SuUB Bremen
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