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Hermeticity testing of MEMS and microelectronic packages
Artech House integrated microsystems series
Costello, Suzanne
, 2013
Exemplar:
Zentrale:Magazinturm E02
a elt 714 e/693
RT Book, Whole T1 <Title>Hermeticity testing of MEMS and microelectronic packages</Title> UL https://suche.suub.uni-bremen.de/peid=B162024481&Exemplar=1&LAN=DE A1 Costello, Suzanne PB Artech House PP Boston [u.a.] YR 2013 NO 195 S. : Ill., graph. Darst. T3 Artech House integrated microsystems series SN 978-1-60807-527-0 SN 1-60807-527-3 SN 97816080752710 LK http://katalog.suub.uni-bremen.de/DB=1/LNG=DU/CMD?ACT=SRCHA&IKT=8000&TRM=1513371509* CN Magazinturm E02: a elt 714 e/693 SF ELIB - SuUB Bremen
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