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Drucksensoren für die Systemintegration in Silizium
Fortschritt-Berichte / VDI, Reihe 9, Elektronik ; Nr. 201
Adams, Stefan
- Als Ms. gedr . , 1995
Exemplar:
Zentrale:Magazin
01.d.2312
RT Dissertation/Thesis T1 <Title>Drucksensoren für die Systemintegration in Silizium</Title> UL https://suche.suub.uni-bremen.de/peid=B18372697&Exemplar=1&LAN=DE A1 Adams, Stefan NO Als Ms. gedr PB VDI-Verl. PP Düsseldorf YR 1995 NO VIII, 109 S ; 21 cm : Ill., graph. Darst T3 Fortschritt-Berichte / VDI, Reihe 9, Elektronik ; Nr. 201 SN 3183201097 SN 9783183201099 VO 201 LK http://katalog.suub.uni-bremen.de/DB=1/LNG=DU/CMD?ACT=SRCHA&IKT=8000&TRM=15599840* CN Magazin: 01.d.2312 SF ELIB - SuUB Bremen
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