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1
Microlithography
, In:
Handbook of microlithography, micromachining, and microfabrication / P. Rai-Choudhury, ed
Vol. 1
,
IEE materials and devices series ; 12,[A];SPIE Press monograph ; 39
Rai-Choudhury, P.
, 1997
Exemplar:
Zentrale:Magazinturm E02
a elt 699 d/506-1
RT Book, Whole T1 <cTitle>Handbook of microlithography, micromachining, and microfabrication / P. Rai-Choudhury, ed<br>Vol. 1</cTitle>: T1 <Title>Microlithography</Title> UL https://suche.suub.uni-bremen.de/peid=B22717632&Exemplar=1&LAN=DE A1 Rai-Choudhury, P. PB SPIE Optical Engineering Press [u.a.] PP Bellingham, Wash. YR 1997 NO VIII, 768 S ; 26 cm : Ill., graph. Darst T3 IEE materials and devices series ; 12,[A] T3 SPIE Press monograph ; 39 SN 0819423785 SN 0852969066 SN 9780852969069 VO Vol. 1 VO 12 VO 39 LK http://katalog.suub.uni-bremen.de/DB=1/LNG=DU/CMD?ACT=SRCHA&IKT=8000&TRM=26872602* CN Magazinturm E02: a elt 699 d/506-1 SF ELIB - SuUB Bremen
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