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Developments in semiconductor microlithography II
April 4-5, 1977, San Jose, California Proceedings of the Society of Photo-Optical Instrumentation Engineers ; 100
Griffin, James W.
, 1978
Exemplar:
Zentrale:Magazinturm E02
a elt 667 i/029-
RT Book, Whole T1 <Title>Developments in semiconductor microlithography II</Title> : <SubTitle>April 4-5, 1977, San Jose, California</SubTitle> UL https://suche.suub.uni-bremen.de/peid=B22773930&Exemplar=1&LAN=DE A1 Griffin, James W. PB SPIE PP Bellingham, Wash. YR 1978 NO VIII, 175 S : Ill., graph. Darst T3 Proceedings of the Society of Photo-Optical Instrumentation Engineers ; 100 SN 0892521279 SN 9780892521272 VO 100 LK http://katalog.suub.uni-bremen.de/DB=1/LNG=DU/CMD?ACT=SRCHA&IKT=8000&TRM=23701518* CN Magazinturm E02: a elt 667 i/029- SF ELIB - SuUB Bremen
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