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1
Micromachining and microfabrication
, In:
Handbook of microlithography, micromachining, and microfabrication / P. Rai-Choudhury, ed
Vol. 2
,
IEE materials and devices series ; 12,B;SPIE Press monograph ; 40
Rai-Choudhury, P.
, 1997
Exemplar:
Zentrale:Magazinturm E02
a elt 699 d/506-2
RT Book, Whole T1 <cTitle>Handbook of microlithography, micromachining, and microfabrication / P. Rai-Choudhury, ed<br>Vol. 2</cTitle>: T1 <Title>Micromachining and microfabrication</Title> UL https://suche.suub.uni-bremen.de/peid=B23451629&Exemplar=1&LAN=DE A1 Rai-Choudhury, P. PB SPIE Optical Engineering Press [u.a.] PP Bellingham, Wash. YR 1997 NO VIII, 692 S. ; 26 cm : Ill., graph. Darst. T3 IEE materials and devices series ; 12,B T3 SPIE Press monograph ; 40 SN 0819423793 SN 0852969112 SN 9780852969113 VO Vol. 2 VO 12,B VO 40 LK http://katalog.suub.uni-bremen.de/DB=1/LNG=DU/CMD?ACT=SRCHA&IKT=8000&TRM=27955490* CN Magazinturm E02: a elt 699 d/506-2 SF ELIB - SuUB Bremen
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