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Plasma Immersions Ionenimplantation
Teilvorhaben: Anwendungsorientierte Grundlagen der PII ; Ab...
Rauschenbach, B.
;
Ensinger, W.
- [Electronic ed.] . , 1997
Link:
http://edok01.tib.uni-hannover.de/edoks/e001/237788284..
RT Book, Whole T1 <Title>Plasma Immersions Ionenimplantation</Title> : <SubTitle>Teilvorhaben: Anwendungsorientierte Grundlagen der PII ; Abschlußbericht</SubTitle> UL https://suche.suub.uni-bremen.de/peid=B23778828&Exemplar=1&LAN=DE A1 Rauschenbach, B. A1 Ensinger, W. NO [Electronic ed.] PB Univ., Inst. für Physik PP Augsburg YR 1997 NO 47 p. = 4240 kB, text and images LK http://edok01.tib.uni-hannover.de/edoks/e001/237788284.pdf SF ELIB - SuUB Bremen
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