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Anwendungsgerechte Systemintegration und Zuverlässigkeit f..
Teilprojekt: Silizium-Glas- und Silizium-Bonden ; Schlußber...
Schmidt, Bernd
- [Electronic ed.] . , 1998
Link:
http://edok01.tib.uni-hannover.de/edoks/e001/242902162..
RT Book, Whole T1 <Title>Anwendungsgerechte Systemintegration und Zuverlässigkeit für die Intelligente Mikromechanische Sensorik - AN-SYS: Verbundprojekt</Title> : <SubTitle>Teilprojekt: Silizium-Glas- und Silizium-Bonden ; Schlußbericht</SubTitle> UL https://suche.suub.uni-bremen.de/peid=B24290216&Exemplar=1&LAN=DE A1 Schmidt, Bernd NO [Electronic ed.] PP [Rossendorf] YR 1998 NO 19 p. = 83 kB, text LK http://edok01.tib.uni-hannover.de/edoks/e001/242902162.pdf SF ELIB - SuUB Bremen
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