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Laserbasierte Ultrapräzisionstechnik, 157 nm-Lithographie ..
Berichtszeitraum: 01.04.1999 - 30.09.2001 ; Abschlussberich...
Henke, Wolfgang
;
Schilz, Christof
;
Rottstegge, Jörg
- [Elektronische Ressource] . , 2002
Link:
http://edok01.tib.uni-hannover.de/edoks/e01fb02/356973..
RT Book, Whole T1 <Title>Laserbasierte Ultrapräzisionstechnik, 157 nm-Lithographie (157 nm)</Title> : <SubTitle>Berichtszeitraum: 01.04.1999 - 30.09.2001 ; Abschlussbericht zum Vorhaben</SubTitle> UL https://suche.suub.uni-bremen.de/peid=B35697308&Exemplar=1&LAN=DE A1 Henke, Wolfgang A1 Schilz, Christof A1 Rottstegge, Jörg NO [Elektronische Ressource] PP München YR 2002 NO Online-Ressource ([5], 30 p. = 1,06 MB) : ill., graphs LK http://edok01.tib.uni-hannover.de/edoks/e01fb02/356973085.pdf SF ELIB - SuUB Bremen
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