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Shape and functional elements of the bulk silicon microtech..
a manual of wet-etched silicon structures ; with 75 tables
Frühauf, Joachim
, 2005
Exemplar:
Zentrale:Magazinturm E02
a elt 667 e/691
RT Book, Whole T1 <Title>Shape and functional elements of the bulk silicon microtechnique</Title> : <SubTitle>a manual of wet-etched silicon structures ; with 75 tables</SubTitle> UL https://suche.suub.uni-bremen.de/peid=B39032086&Exemplar=1&LAN=DE A1 Frühauf, Joachim PB Springer PP Berlin YR 2005 NO XII, 221 S. ; 24 cm : Ill., graph. Darst. SN 3-540-22109-3 SN 9783540221098 LK http://katalog.suub.uni-bremen.de/DB=1/LNG=DU/CMD?ACT=SRCHA&IKT=8000&TRM=85702897* CN Magazinturm E02: a elt 667 e/691 SF ELIB - SuUB Bremen
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