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Micro process engineering
fundamentals, devices, fabrication, and applications Advanced micro & nanosystems ; 5
Kockmann, Norbert
, 2006
Exemplar:
Zentrale
;
TB BHV
;
TB Technik
;
RT Book, Whole T1 <Title>Micro process engineering</Title> : <SubTitle>fundamentals, devices, fabrication, and applications</SubTitle> UL https://suche.suub.uni-bremen.de/peid=B50142213&Exemplar=1&LAN=DE A1 Kockmann, Norbert PB Wiley-VCH PP Weinheim YR 2006 NO XXII, 507 S. ; 25 cm : Ill., graph. Darst. T3 Advanced micro & nanosystems ; 5 SN 3527312463 SN 9783527312467 SN 9783527312467 VO 5 LK http://katalog.suub.uni-bremen.de/DB=1/LNG=DU/CMD?ACT=SRCHA&IKT=8000&TRM=75538485* CN E02: a ing 431.5 m/879-3 CN TB Technik: d 95/76 CN TB BHV: cet 140/19 SF ELIB - SuUB Bremen
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