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1 Ergebnisse
1
Verbundvorhaben 157nm-Lithographie - Konzipierung, Aufbau u..
Schlussbericht ; Laufzeit des Vorhabens: 01.10.2001 - 31.12...
Rohde, Axel
, [ca. 2006]
Link:
http://edok01.tib.uni-hannover.de/edoks/e01fb06/516949..
RT Book, Whole T1 <Title>Verbundvorhaben 157nm-Lithographie - Konzipierung, Aufbau und Test eines Funktionsmusters des optischen Systems für 157nm-Scanner</Title> : <SubTitle>Schlussbericht ; Laufzeit des Vorhabens: 01.10.2001 - 31.12.2005</SubTitle> UL https://suche.suub.uni-bremen.de/peid=B51694980&Exemplar=1&LAN=DE A1 Rohde, Axel PP Oberkochen YR 2006 NO Online-Ressource (14 S., 2,93 MB) : Ill., graph. Darst. LK http://dx.doi.org/https://doi.org/10.2314/GBV:516949802 DO https://doi.org/10.2314/GBV:516949802 LK http://dx.doi.org/10.2314/GBV:516949802 DO 10.2314/GBV:516949802 LK http://edok01.tib.uni-hannover.de/edoks/e01fb06/516949802.pdf SF ELIB - SuUB Bremen
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