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Mathematical modelling of indirect measurements in periodic..
Preprint / Weierstraß-Institut für Angewandte Analysis und Stochastik ; 1099
Gross, Hermann
;
Model, Regine
;
Bär, Markus
... , 2006
Link:
http://webdoc.sub.gwdg.de/ebook/serien/e/wias/2006/200..
RT Book, Whole T1 <Title>Mathematical modelling of indirect measurements in periodic diffractive optics and scatterometry</Title> UL https://suche.suub.uni-bremen.de/peid=B51789944&Exemplar=1&LAN=DE A1 Gross, Hermann A1 Model, Regine A1 Bär, Markus A1 Wurm, Matthias A1 Bodermann, Bernd A1 Rathsfeld, Andreas PP Berlin YR 2006 NO Online-Ressource (PDF-Datei: 19 S., 630 KB) : graph. Darst. T3 Preprint / Weierstraß-Institut für Angewandte Analysis und Stochastik ; 1099 VO 1099 LK http://webdoc.sub.gwdg.de/ebook/serien/e/wias/2006/2006/wias_preprints_1099.pdf SF ELIB - SuUB Bremen
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