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MEMS materials and processes handbook
MEMS reference shelf
Ghodssi, Reza
, 2011
Exemplar:
Zentrale:Magazin
03.k.0642
RT Book, Whole T1 <Title>MEMS materials and processes handbook</Title> UL https://suche.suub.uni-bremen.de/peid=B51810882&Exemplar=1&LAN=DE A1 Ghodssi, Reza PB Springer PP New York, NY YR 2011 NO XXXV, 1187 S. : Ill., graph. Darst. T3 MEMS reference shelf SN 0387473165 SN 9780387473161 SN 9780387473161 LK http://katalog.suub.uni-bremen.de/DB=1/LNG=DU/CMD?ACT=SRCHA&IKT=8000&TRM=1233304844* CN Magazin: 03.k.0642 SF ELIB - SuUB Bremen
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