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Performance assessment of run-to-run control in semiconduct..:
, In:
International journal of production research / Institution of Production Engineers ; American Institute of Industrial Engineers ; Society of Manufacturing Engineers
Jang, Shi-shang
;
Wang, David Shan-hill
;
Chen, Liang
.. (2009) 15 - p. 4173-4199
Exemplar:
Zentrale
;
RT Journal Article T1 <Title>Performance assessment of run-to-run control in semiconductor manufacturing based on IMC framework</Title> UL https://suche.suub.uni-bremen.de/peid=B61187208&Exemplar=1&LAN=DE A1 Jang, Shi-shang A1 Wang, David Shan-hill A1 Chen, Liang A1 Ma, Mingda YR 2009 NO : graph. Darst. JF International journal of production research / Institution of Production Engineers ; American Institute of Industrial Engineers ; Society of Manufacturing Engineers VO 47 IS 15 SP 4173 OP 4199 LK http://katalog.suub.uni-bremen.de/DB=1/LNG=DU/CMD?ACT=SRCHA&IKT=8000&TRM=12584968* CN E02: z ing 016 jc/761 CN ZS-Lesesaal: ing 005 CN Magazin Zs: fc 7761 SF ELIB - SuUB Bremen
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