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1 Ergebnisse
1
Schlussbericht zum Teilprojekt "UV-Nanoimprint Justagemodul..
Medea Plus Projekt: 2T305 ; Laufzeit des Vorhabens 01.03.20...
Schlachter, Florian
, [2010]
Link:
http://edok01.tib.uni-hannover.de/edoks/e01fb10/619564..
RT Book, Whole T1
Schlussbericht zum Teilprojekt "UV-Nanoimprint Justagemodul und Prozess für den FEOL- und BEOL-Einsatz" innerhalb des bmb+f Verbundprojektes "Evaluierung der Nano-Imprint-Technologie für sub-35nm-IC" - Fantastic
:
Medea Plus Projekt: 2T305 ; Laufzeit des Vorhabens 01.03.2006 - 30.09.2009
UL https://suche.suub.uni-bremen.de/peid=B61956406&Exemplar=1&LAN=DE A1 Schlachter, Florian PP Aachen YR 2010 NO Online-Ressource (25 S., 1,12 MB) : Ill., graph. Darst. LK http://dx.doi.org/https://doi.org/10.2314/GBV:619564067 DO https://doi.org/10.2314/GBV:619564067 LK http://dx.doi.org/10.2314/GBV:619564067 DO 10.2314/GBV:619564067 LK http://edok01.tib.uni-hannover.de/edoks/e01fb10/619564067.pdf SF ELIB - SuUB Bremen
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