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1 Ergebnisse
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Multi-step ART1 algorithm for recognition of defect pattern..:
, In:
International journal of production research / Institution of Production Engineers ; American Institute of Industrial Engineers ; Society of Manufacturing Engineers
Kim, Sung-hee
;
Choi, Gyunghyun
;
Ha, Chunghun
.. (2012) 12 - p. 3274-3287
Exemplar:
Zentrale
;
RT Journal Article T1 <Title>Multi-step ART1 algorithm for recognition of defect patterns on semiconductor wafers</Title> UL https://suche.suub.uni-bremen.de/peid=B72134508&Exemplar=1&LAN=DE A1 Kim, Sung-hee A1 Choi, Gyunghyun A1 Ha, Chunghun A1 Bae, Suk Joo YR 2012 NO : graph. Darst. JF International journal of production research / Institution of Production Engineers ; American Institute of Industrial Engineers ; Society of Manufacturing Engineers VO 50 IS 12 SP 3274 OP 3287 LK http://katalog.suub.uni-bremen.de/DB=1/LNG=DU/CMD?ACT=SRCHA&IKT=8000&TRM=12584968* CN Zentrale: z ing 016 jc/761 CN ZS-Lesesaal: ing 005 CN Magazin Zs: fc 7761 SF ELIB - SuUB Bremen
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