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Echtzeit-in-situ-Messung der Oberflächenbelegung einer Mag..
Wissenschaftlich-Technische Berichte / FZR, Forschungszentrum Rossendorf ; 411
Güttler, Dominik
, 2004
Link:
http://edok01.tib.uni-hannover.de/edoks/e01fn13/738082..
RT Book, Whole T1 <Title>Echtzeit-in-situ-Messung der Oberflächenbelegung einer Magnetron-Kathode bei der reaktiven Sputter-Abscheidung</Title> UL https://suche.suub.uni-bremen.de/peid=B73808259&Exemplar=1&LAN=DE A1 Güttler, Dominik PB FZR, Forschungszentrum Rossendorf PP Dresden YR 2004 NO Online-Ressource (PDF-Datei: 94 S., 4.728 KB) : graph. Darst. T3 Wissenschaftlich-Technische Berichte / FZR, Forschungszentrum Rossendorf ; 411 VO 411 LK http://edok01.tib.uni-hannover.de/edoks/e01fn13/738082597.pdf SF ELIB - SuUB Bremen
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