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1 Ergebnisse
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A hierarchical model for characterising spatial wafer varia..:
, In:
International journal of production research / Institution of Production Engineers ; American Institute of Industrial Engineers ; Society of Manufacturing Engineers
Bao, Lulu
;
Jin, Ran
. (2014) 6 - p. 1827-1842
Exemplar:
Zentrale
;
RT Journal Article T1 <Title>A hierarchical model for characterising spatial wafer variations</Title> UL https://suche.suub.uni-bremen.de/peid=B78122882&Exemplar=1&LAN=DE A1 Bao, Lulu A1 Jin, Ran YR 2014 NO : graph. Darst. JF International journal of production research / Institution of Production Engineers ; American Institute of Industrial Engineers ; Society of Manufacturing Engineers VO 52 IS 6 SP 1827 OP 1842 LK http://katalog.suub.uni-bremen.de/DB=1/LNG=DU/CMD?ACT=SRCHA&IKT=8000&TRM=12584968* CN Zentrale: z ing 016 jc/761 CN ZS-Lesesaal: ing 005 CN Magazin Zs: fc 7761 SF ELIB - SuUB Bremen
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