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Wafer fabrication yield learning and cost analysis based on..:
, In:
International journal of production research / Institution of Production Engineers ; American Institute of Industrial Engineers ; Society of Manufacturing Engineers
Tirkel, Israel
;
Price, David
;
Southerland, Doug
.. (2016) 11/12 - p. 3578-3590
Exemplar:
Zentrale
;
RT Journal Article T1 <Title>Wafer fabrication yield learning and cost analysis based on in-line inspection</Title> UL https://suche.suub.uni-bremen.de/peid=B86273374&Exemplar=1&LAN=DE A1 Tirkel, Israel A1 Price, David A1 Southerland, Doug A1 Rabinowitz, Gad YR 2016 JF International journal of production research / Institution of Production Engineers ; American Institute of Industrial Engineers ; Society of Manufacturing Engineers VO 54 IS 11/12 SP 3578 OP 3590 LK http://katalog.suub.uni-bremen.de/DB=1/LNG=DU/CMD?ACT=SRCHA&IKT=8000&TRM=12584968* CN E02: z ing 016 jc/761 CN ZS-Lesesaal: ing 005 CN Magazin Zs: fc 7761 SF ELIB - SuUB Bremen
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