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1 Ergebnisse
1
Development of generic simulation models to evaluate wafer ..:
, In:
Proceedings of the 24th conference on Winter simulation
,
Pierce, Neal G.
;
Drevna, Michael J.
- p. 874-878 , 1992
Link:
https://dl.acm.org/doi/10.1145/167293.167757
RT T1
Proceedings of the 24th conference on Winter simulation
: T1
Development of generic simulation models to evaluate wafer fabrication cluster tools
UL https://suche.suub.uni-bremen.de/peid=acm-167757&Exemplar=1&LAN=DE A1 Pierce, Neal G. A1 Drevna, Michael J. PB ACM YR 1992 K1 Hardware K1 Hardware validation K1 Functional verification K1 Simulation and emulation K1 Computing methodologies K1 Modeling and simulation K1 Model development and analysis K1 Modeling methodologies K1 Applied computing K1 Physical sciences and engineering K1 Engineering K1 Computer-aided design K1 Arts and humanities K1 Architecture (buildings) SP 874 OP 878 LK http://dx.doi.org/https://dl.acm.org/doi/10.1145/167293.167757 DO https://dl.acm.org/doi/10.1145/167293.167757 SF ELIB - SuUB Bremen
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