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Template-mask design methodology for double patterning tech..:

, In: Proceedings of the International Conference on Computer-Aided Design,
Hsu, Chin-Hsiung ; Chang, Yao-Wen ; Nassif, Sani Richard - p. 107-111 , 2010
Link: https://dl.acm.org/doi/10.5555/2133429.2133450