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Design-aware lithography:

, In: Proceedings of the 2012 ACM international symposium on International Symposium on Physical Design,
Banerjee, Shayak ; Agarwal, Kanak B. ; Nassif, Sani R. - p. 3-8 , 2012
Link: https://dl.acm.org/doi/10.1145/2160916.2160920