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Stitch-aware routing for multiple e-beam lithography:

, In: Proceedings of the 50th Annual Design Automation Conference,
Fang, Shao-Yun ; Liu, Iou-Jen ; Chang, Yao-Wen - p. 1-6 , 2013
Link: https://dl.acm.org/doi/10.1145/2463209.2488765