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1 Ergebnisse
1
EUV and e-beam manufacturability : challenges and soluti..:
, In:
Proceedings of the 52nd Annual Design Automation Conference
,
Chang, Yao-Wen
;
Liu, Ru-Gun
;
Fang, Shao-Yun
- p. 1-6 , 2015
Link:
https://dl.acm.org/doi/10.1145/2744769.2747925
RT T1
Proceedings of the 52nd Annual Design Automation Conference
: T1
EUV and e-beam manufacturability : challenges and solutions
UL https://suche.suub.uni-bremen.de/peid=acm-2747925&Exemplar=1&LAN=DE A1 Chang, Yao-Wen A1 Liu, Ru-Gun A1 Fang, Shao-Yun PB ACM YR 2015 K1 design for manufacturability K1 electron beam lithography K1 extreme ultraviolet lithography K1 flare effect K1 fogging effect K1 heating effect K1 physical design K1 proximity effect K1 shadowing effect K1 stitching effect K1 Hardware K1 Electronic design automation K1 Physical design (EDA) SP 1 OP 6 LK http://dx.doi.org/https://dl.acm.org/doi/10.1145/2744769.2747925 DO https://dl.acm.org/doi/10.1145/2744769.2747925 SF ELIB - SuUB Bremen
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