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EUV and e-beam manufacturability : challenges and soluti..:

, In: Proceedings of the 52nd Annual Design Automation Conference,
Chang, Yao-Wen ; Liu, Ru-Gun ; Fang, Shao-Yun - p. 1-6 , 2015
Link: https://dl.acm.org/doi/10.1145/2744769.2747925