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A robust approach for process variation aware mask optimiza..:

, In: Proceedings of the 2015 Design, Automation & Test in Europe Conference & Exhibition,
Kuang, Jian ; Chow, Wing-Kai ; Young, Evangeline F. Y. - p. 1591-1594 , 2015
Link: https://dl.acm.org/doi/10.5555/2755753.2757180