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Defect Probability of Directed Self-Assembly Lithography ..:

, In: Proceedings of the IEEE/ACM International Conference on Computer-Aided Design,
Shim, Seongbo ; Chung, Woohyun ; Shin, Youngsoo - p. 404-409 , 2015
Link: https://dl.acm.org/doi/10.5555/2840819.2840876