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1 Ergebnisse
1
Subwavelength lithography (panel) : how will it affect y..:
, In:
Proceedings of the 36th annual ACM/IEEE Design Automation Conference
,
Pati, Y. C.
;
Grobman, Warren
;
Pack, Robert
.. - p. 798 ff. , 1999
Link:
https://dl.acm.org/doi/10.1145/309847.310070
RT T1 <cTitle>Proceedings of the 36th annual ACM/IEEE Design Automation Conference</cTitle>: T1 <Title>Subwavelength lithography (panel) : how will it affect your design flow?</Title> UL https://suche.suub.uni-bremen.de/peid=acm-310070&Exemplar=1&LAN=DE A1 Pati, Y. C. A1 Grobman, Warren A1 Pack, Robert A1 Glasser, Lance A1 Kahng, Andrew B. PB ACM YR 1999 K1 General and reference K1 Document types SP 798 ff. LK http://dx.doi.org/https://dl.acm.org/doi/10.1145/309847.310070 DO https://dl.acm.org/doi/10.1145/309847.310070 SF ELIB - SuUB Bremen
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