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1 Ergebnisse
1
Novel Guiding Template and Mask Assignment for DSA-MP Hybri..:
, In:
Proceedings of the 56th Annual Design Automation Conference 2019
,
Lin, Yi-Ting
;
Jiang, Iris Hui-Ru
- p. 1-6 , 2019
Link:
https://dl.acm.org/doi/10.1145/3316781.3317871
RT T1 <cTitle>Proceedings of the 56th Annual Design Automation Conference 2019</cTitle>: T1 <Title>Novel Guiding Template and Mask Assignment for DSA-MP Hybrid Lithography Using Multiple BCP Materials</Title> UL https://suche.suub.uni-bremen.de/peid=acm-3317871&Exemplar=1&LAN=DE A1 Lin, Yi-Ting A1 Jiang, Iris Hui-Ru PB ACM YR 2019 K1 Directed self-assembly K1 guiding template K1 multiple patterning SP 1 OP 6 LK http://dx.doi.org/https://dl.acm.org/doi/10.1145/3316781.3317871 DO https://dl.acm.org/doi/10.1145/3316781.3317871 SF ELIB - SuUB Bremen
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