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Modular model-based supervisory controller design for wafer..:

, In: Proceedings of the 18th International Conference on Model Driven Engineering Languages and Systems,
van der Sanden, Bram ; Reniers, Michel ; Geilen, Marc... - p. 416-425 , 2015
Link: https://dl.acm.org/doi/10.5555/3351736.3351786