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Reverse-order source/drain formation with double offset spa..:

, In: Proceedings of the 2003 international symposium on Low power electronics and design,
Choi, Woo Young ; Lee, Jong Duk ; Park, Byung-Gook - p. 189-192 , 2003
Link: https://dl.acm.org/doi/10.1145/871506.871554