I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Microelectronics processing: chemical engineering aspects
Advances in Chemistry Series, 221
Hess, Dennis W
;
Jensen, Klavs F
, 1989
Link:
https://pubs.acs.org/doi/book/10.1021/ba-1989-0221
RT T1
Microelectronics processing: chemical engineering aspects
UL https://suche.suub.uni-bremen.de/peid=acs-00831797&Exemplar=1&LAN=DE A1 Hess, Dennis W A1 Jensen, Klavs F PB American Chemical Society YR 1989 NO 1 Online-Ressource (1 S.) T3 Advances in Chemistry Series, 221 SN 9780841224032 K1 Microelectronics K1 Integrated circuits K1 Surface chemistry K1 Crystal growth K1 Liquid phase epitaxy K1 Compound semiconductors K1 Physical vapor deposition K1 Chemical vapor deposition K1 Silicon K1 Microlithography K1 Plasma etching K1 Semiconductors K1 Solution (Chemistry) K1 Electronics K1 Chemical Engineering K1 Crystallization K1 Chemical Phenomena K1 Silicon Compounds K1 Oxides K1 Lithography K1 TECHNOLOGY & ENGINEERING / Electronics / Microelectronics LK http://dx.doi.org/https://pubs.acs.org/doi/book/10.1021/ba-1989-0221 DO https://pubs.acs.org/doi/book/10.1021/ba-1989-0221 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)