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1 Ergebnisse
1
Polymers in microlithography: materials and processes
ACS symposium series, 412
Reichmanis, Elsa
;
MacDonald, Scott A
;
Iwayanagi, Takao
, 1989
Link:
https://pubs.acs.org/doi/book/10.1021/bk-1989-0412
RT T1
Polymers in microlithography: materials and processes
UL https://suche.suub.uni-bremen.de/peid=acs-00832055&Exemplar=1&LAN=DE A1 Reichmanis, Elsa A1 MacDonald, Scott A A1 Iwayanagi, Takao PB American Chemical Society YR 1989 NO 1 Online-Ressource (1 S.) T3 ACS symposium series, 412 SN 9780841212688 K1 Polymers K1 Photoresists K1 Microlithography K1 Thermistors K1 Anhydrides K1 Plasma etching K1 Crosslinking (Polymerization) K1 Polystyrene K1 Phenolic resins K1 Imaging systems K1 Photochemistry K1 Block copolymers K1 Electron beams K1 Plasma polymerization K1 Interferometers K1 Excimer lasers K1 Thiosulfates K1 Polyzwitterions K1 Pyrimidines K1 Anthracene K1 Thin films, Multilayered K1 Fluorescence K1 Laser ablation K1 Time-resolved spectroscopy K1 Quartz crystal microbalances K1 Far ultraviolet radiation K1 Ultraviolet radiation K1 Printing K1 Semiconductors K1 Electric Impedance K1 Temperature K1 Engraving and Engravings K1 Plasma Gases K1 Polymerization K1 Polystyrenes K1 Resins, Synthetic K1 Image Processing, Computer-Assisted K1 Photochemical Processes K1 Electrons K1 Optical Devices K1 Lasers, Excimer K1 Anthocyanins K1 Surface Properties K1 Laser Therapy K1 Spectrum Analysis K1 Quartz Crystal Microbalance Techniques K1 Ultraviolet Rays K1 TECHNOLOGY & ENGINEERING / Textiles & Polymers K1 TECHNOLOGY & ENGINEERING / Materials Science / Electronic Materials LK http://dx.doi.org/https://pubs.acs.org/doi/book/10.1021/bk-1989-0412 DO https://pubs.acs.org/doi/book/10.1021/bk-1989-0412 SF ELIB - SuUB Bremen
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