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1 Ergebnisse
1
Micro- and nanopatterning polymers
ACS symposium series, 706
Ito, Hiroshi
;
Reichmanis, Elsa
;
Nalamasu, Omkaram
. , 1998
Link:
https://pubs.acs.org/doi/book/10.1021/bk-1998-0706
RT T1
Micro- and nanopatterning polymers
UL https://suche.suub.uni-bremen.de/peid=acs-00867167&Exemplar=1&LAN=DE A1 Ito, Hiroshi A1 Reichmanis, Elsa A1 Nalamasu, Omkaram A1 Ueno, Takumi PB American Chemical Society YR 1998 NO 1 Online-Ressource (1 S.) T3 ACS symposium series, 706 SN 9780841216884 K1 Microelectronics K1 Photoresists K1 Polymeric composites K1 Block copolymers K1 Lithography K1 Diblock copolymers K1 Nanostructures K1 Nanolithography K1 Microlithography K1 Organic conductors K1 Metallizing K1 Polytef K1 Photolithography K1 Thin films K1 Molding (Chemical technology) K1 Crosslinked polymers K1 Acids K1 Diazo compounds K1 Addition polymerization K1 Macromolecules K1 Excimer lasers K1 Bicyclic compounds K1 Calixarenes K1 Dendrimers K1 Electron beams K1 Extreme ultraviolet lithography K1 Polyimides K1 Electronics K1 Printing K1 Plastics K1 Polymers K1 Nanotechnology K1 Organometallic Compounds K1 Metals K1 Surface Properties K1 Polytetrafluoroethylene K1 Chemical Engineering K1 Inventions K1 Diffusion K1 Nitrogen Compounds K1 Radiation Effects K1 Polymerization K1 Macromolecular Substances K1 Lasers, Excimer K1 Bridged Bicyclo Compounds K1 Electrons K1 Ultraviolet Rays K1 Imides K1 Research K1 TECHNOLOGY & ENGINEERING / Electronics / Microelectronics K1 TECHNOLOGY & ENGINEERING / Textiles & Polymers LK http://dx.doi.org/https://pubs.acs.org/doi/book/10.1021/bk-1998-0706 DO https://pubs.acs.org/doi/book/10.1021/bk-1998-0706 SF ELIB - SuUB Bremen
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