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Thermomechanical properties of aluminum oxide thin films ma..:
Ylivaara, Oili M.E
;
Langner, Andreas
;
Ek, Satu
...
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. , 2022
Link:
https://aaltodoc.aalto.fi/handle/123456789/118688
RT Journal T1
Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition
UL https://suche.suub.uni-bremen.de/peid=base-ftaaltouniv:oai:aaltodoc.aalto.fi:123456789_118688&Exemplar=1&LAN=DE A1 Ylivaara, Oili M.E A1 Langner, Andreas A1 Ek, Satu A1 Malm, Jari A1 Julin, Jaakko A1 Laitinen, Mikko A1 Ali, Saima A1 Sintonen, Sakari A1 Lipsanen, Harri A1 Sajavaara, Timo A1 Puurunen, Riikka L PB American Institute of Physics YR 2022 JF Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films LK http://dx.doi.org/https://aaltodoc.aalto.fi/handle/123456789/118688 DO https://aaltodoc.aalto.fi/handle/123456789/118688 SF ELIB - SuUB Bremen
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