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1 Ergebnisse
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Simulation of conformality of ALD growth inside lateral cha..:
Järvilehto, Jänis
;
Velasco, Jorge A
;
Yim, Jihong
..
Physical Chemistry Chemical Physics. , 2023
Link:
https://aaltodoc.aalto.fi/handle/123456789/123911
RT Journal T1
Simulation of conformality of ALD growth inside lateral channels: comparison between a diffusion-reaction model and a ballistic transport-reaction model
UL https://suche.suub.uni-bremen.de/peid=base-ftaaltouniv:oai:aaltodoc.aalto.fi:123456789_123911&Exemplar=1&LAN=DE A1 Järvilehto, Jänis A1 Velasco, Jorge A A1 Yim, Jihong A1 Gonsalves, Christine A1 Puurunen, Riikka L PB Royal Society of Chemistry YR 2023 JF Physical Chemistry Chemical Physics LK http://dx.doi.org/https://aaltodoc.aalto.fi/handle/123456789/123911 DO https://aaltodoc.aalto.fi/handle/123456789/123911 SF ELIB - SuUB Bremen
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