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1 Ergebnisse
1
Effect of ozone concentration on silicon surface passivatio..:
von Gastrow, Guillaume
;
Li, Shuo
;
Putkonen, Matti
...
APPLIED SURFACE SCIENCE. , 2017
Link:
https://aaltodoc.aalto.fi/handle/123456789/24221
RT Journal T1 <Title>Effect of ozone concentration on silicon surface passivation by atomic layer deposited Al2O3</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftaaltouniv:oai:aaltodoc.aalto.fi:123456789_24221&Exemplar=1&LAN=DE A1 von Gastrow, Guillaume A1 Li, Shuo A1 Putkonen, Matti A1 Laitinen, Mikko A1 Sajavaara, Timo A1 Savin, Hele YR 2017 K1 Interface JF APPLIED SURFACE SCIENCE LK http://dx.doi.org/https://aaltodoc.aalto.fi/handle/123456789/24221 DO https://aaltodoc.aalto.fi/handle/123456789/24221 SF ELIB - SuUB Bremen
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