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1 Ergebnisse
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Advanced characterizations of fluorine-free tungsten film a..:
Rodriguez, Philippe
;
Famulok, Romain
;
Le Friec, Yannick
...
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.mssp.2017.08.033. , 2017
Link:
https://cea.hal.science/cea-01586412
RT Journal T1
Advanced characterizations of fluorine-free tungsten film and its application as low resistance liner for PCRAM
UL https://suche.suub.uni-bremen.de/peid=base-ftanrparis:oai:HAL:cea-01586412v1&Exemplar=1&LAN=DE A1 Rodriguez, Philippe A1 Famulok, Romain A1 Le Friec, Yannick A1 Reynard, Jean-Philippe A1 Bozon, Benoit-Noël A1 Boyer, Flore A1 Dabertrand, Karen A1 Jahan, Carine A1 Favier, Sylvie A1 Mazel, Yann A1 Previtali, Bernard A1 Gergaud, Patrice A1 Nemouchi, Fabrice PB HAL CCSD; Elsevier YR 2017 K1 Tungsten K1 Contact K1 Interconnects K1 Liner K1 Low resistance K1 PCRAM K1 [SPI.MAT]Engineering Sciences [physics]/Materials K1 [SPI.TRON]Engineering Sciences [physics]/Electronics JF info:eu-repo/semantics/altIdentifier/doi/10.1016/j.mssp.2017.08.033 LK http://dx.doi.org/https://cea.hal.science/cea-01586412 DO https://cea.hal.science/cea-01586412 SF ELIB - SuUB Bremen
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